AW-ZP series online plasma cleaning machine
■Mainly for the lead frame characteristics, equipped with automatic access, transmission, feeding and other auxiliary functions.
■High automation, reducing human factors and reducing secondary pollution.
■Cost-effective, compatible with different material cleaning through component conversion.
■Short cleaning time, no spatter damage and high humidity damage.
■Screen animation shows full line working status, real-time monitoring during operation.
■Equipment parameter hierarchical management to improve operational safety.
■Complete fault alarm function, prompting fault items and faulty stations, easy to repair.
|Dimensions (without alarm beacon)||1650（W）×1000（D）×1650(H)mm|
|Reaction chamber size (aluminum alloy)||280(W)×450(D)×50(H）mm||350（W）×450（D）×50(H)mm|
|Plasma generator||Frequency 13.56MHz, power 0-600W adjustable, automatic impedance matching|
Standard configuration 2 way (O2\Ar/H2), MFC mass flow meter control, gas flow 0-200ml/min adjustable
|Control System||Touch screen + PLC automatic control, manual + automatic two operating modes|
|Compatible chip size||Length 150-270mm, width 30-80mm||Length 105-155mm, width 30-80mm|
|4 4 pieces, UPH about 500 pieces / hour||
4 lanes, 8 pieces, UPH about 1000 pieces / hour
|For product technology||Integrated circuit IC packaging process||LED packaging process|
|Flexible design according to customer needs|
If you have any suggestions for us or have a demand for our products, please contact us!
No. 59, Fengneng Road, Wind Power Technology Park, Huishan Economic Development Zone, Wuxi