AW-P series cavity plasma cleaner

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资质文件服务保障

Product Details

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Product Features

■Compact structure and small footprint

■Good vacuum tightness to ensure stable cleaning

■Parallel electrode plate method, the spacing can be adjusted to suit the size of the cleaning workpiece

■User-friendly interface, easy to operate and maintain

■Reliable performance, good interlocking, fault alarm and real-time monitoring

■A shielding system is installed at the rear end of the cavity to avoid electromagnetic radiation

■Process selective removal of contaminants

■Can store multiple sets of recipes at the same time, call it

■The whole process process is controllable, and various process parameters can be set, modified and monitored online.

Model	AW-P100
Dimensions (including alarm lighthouse)	1000（W）×950（D）×1950(H)mm
Cavity size	500（W）×500（D）×400(H)mm,stainless steel
Plasma generator	Frequency 13.56MHz, power 0-600W adjustable, automatic impedance matching
Electrode specification	Parallel electrode, multi-layer, single layer effective area 450 (W) × 450 (D) mm
Vacuum system	Germany Leybold vacuum pump, imported pneumatic angle valve, inflation valve, high precision vacuum gauge
Pneumatic system	Standard configuration 2 channels, mass flow meter control, gas flow 0-200ml/min adjustable, stainless steel polishing gas pipeline and interface components
Control System	Touch screen + PLC automatic control, manual + automatic two operating modes
Remarks	Flexible design according to customer needs