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蒙自AW-ZP series online plasma cleaning machine

Product Features
Left-in, right-out/right-in, left-out mode, perfect connection between upstream and downstream, highly automated
Short cleaning time, no sputtering damage and high temperature damage
Perfect fault alarm function, prompt fault items and fault stations, easy to repair
Can reabrze MES system transmission (optional)
Classified management of equipment parameters to improve operational safety
The screen animation shows the working status of the whole brne, and the running process is monitored in real time.
Mainly for the characteristics of the lead frame, equipped with automatic pick-up, transmission, debrvery and other auxibrary functions.
Ingenious structural design to solve the problem of transmission card damage caused by inconsistent hardness of incoming sheets.
Automatic component conversion, compatible with different incoming sheet cleaning

产品描述

Product Parameters

Product Model AW-ZP01
Overall dimensions (excluding alarm lighthouse) 1200(L)× 1000(W)× 1800(H)mm
Cavity size 350(L)× 350(W)× 70(H)mm (can be adjusted according to customer requirements)
Plasma generator Frequency 13.56MHz, power 0-600W/1000W adjustable, automatic impedance matching
Size of carrier plate 200(L)× 120(W)× 20(H)mm (can be adjusted according to customer requirements)
Vacuum system Oil pump/dry pump optional, imported pneumatic angle valve, inflation valve, high precision vacuum gauge
Gas path system MFC mass flow meter control, gas flow 0-200 ml/min adjustable, stainless steel polished gas pipeline and interface components
Control System Touch screen PLC automatic control, manual automatic two operation modes (optional industrial computer, MES system connection)
Remarks Flexible design according to customer demand