Product Features
Compact structure and small footprint
Good vacuum tightness to ensure stable cleaning
Parallel electrode plate method, the spacing can be adjusted to suit the size of the cleaning workpiece
User-friendly interface, easy to operate and maintain
Reliable performance, good interlocking, fault alarm and real-time monitoring
A shielding system is installed at the rear end of the cavity to avoid electromagnetic radiation
Process selective removal of contaminants
Can store multiple sets of recipes at the same time, call it
The whole process process is controllable, and various process parameters can be set, modified and monitored online.