The plasma cleaning machine is probably composed of a power supply, a matcher, a cavity, a solenoid valve, a flow meter, an external gas, a vacuum pump, and a control circuit. When there is a fault alarm, we should first check which part of the alarm occurred according to the screen alarm prompt, so as to determine the approximate location of the fault, and then check whether the actuator of the relevant part is abnormal. The most intuitive and simple way to control the fault of the circuit is to detect it with a multimeter, detect whether there is a short circuit or open circuit, and detect whether the voltage and current are normal. If you want to troubleshoot in the absence of a multimeter, the fastest way is to replace the method, first according to the screen prompts to roughly determine the location of the fault, and then replace the same components, if it is an electrical component, such as AC contactor, thermal overload, intermediate relay, phase sequence protector, flowmeter and other components failure, then the problem will be quickly solved.

If it is a gas underpressure alarm, it is necessary to confirm whether there is gas access to the relevant gas inlet, whether the pressure of the gas and the pressure regulator, flow meter, solenoid valve, and analog wiring are OK, and whether the relevant parameter settings of the screen parameters are correct. When the vacuum is too high or too low alarm, you must first look at the parameter setting, when the vacuum is too high and the parameter setting is OK, you have to find out whether the cavity and pipeline are leaking. Whether the vacuum pump pumping pressure is normal, the fastest way is to use the vacuum measuring instrument that comes with the equipment to directly connect to the vacuum pump to measure whether the evacuation value of the vacuum pump can reach the standard, if the evacuation value of the vacuum pump is normal, it means that the vacuum pump is no problem, and then connect the measuring instrument to the pumping pipeline to measure, and the measurement finds that if the evacuation value is much higher than that directly connected to the vacuum pump, it proves that the evacuation pipeline is leaking. Pipe leakage may be due to air leakage at pipe joints or broken pipe leakage. Although the evacuation pipe is made of metal stainless steel, if the pipe shakes and rubs against a certain part of the surrounding area every time it is evacuated, the pipe will also appear worn and worn over time. If the measuring instrument is connected to the evacuation pipeline and directly connected to the vacuum pump to measure the vacuum value, it means that the evacuation pipeline is also good, and then only the cavity tightness is to find the air leakage part, the cavity may leak air parts are the sealing strip, glass window, evacuation joint and external link part, electrode - external link with the cavity, cavity break and external link part, the most prone to air leakage is the sealing strip and glass window.

The fault of the power supply and matcher will also display relevant prompts in the on-screen alarm window when the fault is triggered, but sometimes the false alarm information will be triggered due to parameter settings and other reasons, which should be analyzed according to the situation. When the power supply or matcher fails, first make sure that the parameter settings are correct, and then check whether the voltage signal of the wiring line and the set power output is correct and reasonable, whether the serial port communication between the matcher and the power supply is normal, and then manually debug, if the parameters of the matcher are debugged, there is no obvious change in the relevant parameters when pressing the increase or decrease button, it means that the matcher is faulty, and when the power supply power is adjusted, the power output of the power supply does not change, it means that the power supply is faulty.