

AW-V series microwave plasma cleaning machine
Product characteristics
High degree of ionization and decomposition of gas molecules, uniform ion density
No internal electrode, no working gas in the plasma chamber outside of any material sources of pollution, high cleanbrness
High voltage source and plasma generator isolated from each other, high safety factor
Humanized operation interface, easy operation and maintenance
Rebrable performance, good interlock, fault alarm and real-time monitoring functions
A shielding system is installed at the back end of the cavity to avoid electromagnetic radiation
Process Selective Removal of Contaminants
Can store multiple sets of recipes at the same time, can be called
Optional automatic door mode, convenient for subsequent automation connection requirements
The whole process process is controllable, and various process parameters can be set, modified and monitored onbrne.
High degree of ionization and decomposition of gas molecules, uniform ion density
No internal electrode, no working gas in the plasma chamber outside of any material sources of pollution, high cleanbrness
High voltage source and plasma generator isolated from each other, high safety factor
Humanized operation interface, easy operation and maintenance
Rebrable performance, good interlock, fault alarm and real-time monitoring functions
A shielding system is installed at the back end of the cavity to avoid electromagnetic radiation
Process Selective Removal of Contaminants
Can store multiple sets of recipes at the same time, can be called
Optional automatic door mode, convenient for subsequent automation connection requirements
The whole process process is controllable, and various process parameters can be set, modified and monitored onbrne.
Category:
Keywords: filter, filter element, hydraulic accessories
AW-V series microwave plasma cleaning machine
Product Parameters
Product Model | AW-V70 |
Overall dimensions (including alarm lighthouse) | 1000(L)× 950(W)× 1950(H)mm |
Cavity size | 400(L)× 400(W)× 400(H)mm aviation aluminum 6061 |
Plasma generator | Frequency 2.45GHz, power 50-1000W adjustable |
Electrode specifications | The bottom is equipped with a rotatable tray, and the right side of the chamber body is equipped with a ceramic substrate for microwave diffusion |
Vacuum system | Two-stage vacuum pump, imported pneumatic angle valve, inflation valve, high-precision vacuum gauge |
Gas path system | Process gas: Oz/Ar/Hz, mass flow meter control, gas flow 0-200 ml/min adjustable, stainless steel polished gas pipeline and interface components |
Control System | Touch screen PLC automatic control, manual automatic two operation modes (optional industrial computer, MES system connection) |
Remarks | Flexible design according to customer demand |
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