AW-ZV series on-line microwave plasma cleaning machine

Product Features<br>High degree of ionization and decomposition of gas molecules, uniform ion density<br>High voltage source and plasma generator isolated from each other, high safety factor<br>Humanized operation interface, easy operation and maintenance<br>Rebrable performance, good interlock, fault alarm and real-time monitoring functions<br>A shielding system is installed at the back end of the cavity to avoid electromagnetic radiation<br>Process Selective Removal of Contaminants<br>Can store multiple sets of recipes at the same time, can be called<br>The whole process process is controllable, and various process parameters can be set, modified and monitored onbrne.<br>There is no internal electrode, and there is no material source other than the working gas in the plasma chamber.<br>Chip microwave cleaning, cleaning effect is more uniform, softer, can achieve continuous production

AW-ZP series online plasma cleaning machine

Product Features<br> Compact structure and small footprint<br> Good vacuum tightness to ensure stable cleaning<br> Parallel electrode plate method, the spacing can be adjusted to suit the size of the cleaning workpiece<br> User-friendly interface, easy to operate and maintain<br> Reliable performance, good interlocking, fault alarm and real-time monitoring<br> A shielding system is installed at the rear end of the cavity to avoid electromagnetic radiation<br> Process selective removal of contaminants<br> Can store multiple sets of recipes at the same time, call it<br> The whole process process is controllable, and various process parameters can be set, modified and monitored online.

AW-ZP series online plasma cleaning machine

Product Features<br> Left-in, right-out/right-in, left-out mode, perfect connection between upstream and downstream, highly automated<br>Short cleaning time, no sputtering damage and high temperature damage<br>Perfect fault alarm function, prompt fault items and fault stations, easy to repair<br>Can reabrze MES system transmission (optional)<br>Classified management of equipment parameters to improve operational safety<br>The screen animation shows the working status of the whole brne, and the running process is monitored in real time.<br>Mainly for the characteristics of the lead frame, equipped with automatic pick-up, transmission, debrvery and other auxibrary functions.<br>Ingenious structural design to solve the problem of transmission card damage caused by inconsistent hardness of incoming sheets.<br>Automatic component conversion, compatible with different incoming sheet cleaning